The design, fabrication, and testing of corrugated silicon nitride diaphragms

Sub-micron silicon nitride waveguide fabrication using conventional optical lithography.

We demonstrate a novel technique to fabricate sub-micron silicon nitride waveguides using conventional contact lithography with MEMS-grade photomasks. Potassium hydroxide anisotropic etching of silicon facilitates line reduction and roughness smoothing and is key to the technique. The fabricated waveguides is measured to have a propagation loss of 0.8dB/cm and nonlinear coefficient of γ = 0.3/W...

Pattern Photoresist Silicon Silicon Nitride Silicon Photoresist Silicon Nitride Silicon Etch Nitride Remove Photoresist

In this proposal we seek to establish a porous silicon based etching process in the WTC microfabrication laboratory. The new process will allow us to etch high aspect ratio holes through a wafer. Holes like these are important for decreasing the dead volume of connections between micro and macro systems and for increasing the complexity of micro-fluidic systems. At the present time, the minimum...

Silicon Nitride and Silicon Carbide

Back to the Programme DESIGN, FABRICATION AND CHARACTERIZATION OF AN IN-PLANE AFM PROBE WITH ULTRA-SHARP SILICON NITRIDE TIP

Scanning rates of the atomic force microscope (AFM) could be significantly increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single crystal silicon cantilever. Our fabrication method is fully compatible with the silico...

Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications

Thick silicon nitride blocks embedded in silicon wafers were recently proposed as a substrate for RF devices. In this paper we show that deep trenches filled with silicon nitride—having thin slices of monocrystalline silicon in between—already result in a significantly improved RF behavior. Measurement results are presented on RF coplanar waveguides using solid silicon nitride blocks and silico...